Scanner type (XY)

Parallel-kinematic 2D flexure scanner (single-module design)

Scan size (XY)

Up to 100 × 100 µm²

Scan range (Z)

Up to 15 µm

Z scanner type

Flexure-guided high-force scanner

Control modes

Closed-loop and open-loop; step-wise scan and PinPoint™ mode

Position noise (XY)

< 0.4 nm rms (100 µm range, 1 kHz bandwidth)

Height noise (Z)

~0.03 nm rms (0.5 kHz bandwidth)

Linearity error

< 0.2% (XY, 100 µm); <1% (Z)

Resonant frequency (Z scanner)

~9 kHz