Abstract

This talk will start with a short history and present scale of the now multi-Billion dollar IC industry. This will then move to the metrology (materials characterization) needs extending to the R&D required in developing tomorrows devices. And with the potential insertion of novel oxides and 2D materials into logic, memory and/or interconnects, metrology gaps have already been identified. With this, imec has for the last four decades supported the R&D needs of the industry. Imec is a Research and Technology Organization (RTO) based in Leuven, Belgium, with offices worldwide. The Materials and Components Analysis (MCA) department within the imec-Leuven site supports much of the materials characterization needs, with equipment ranging from APT, ARPES, ERD, HAXPES, IR, Raman, PEEM, PL, RBS, SEM, SIMS, SPM, TEM, UPS, XPS, augmented with access to synchrotron capabilities. This talk concludes with coverage of analytical solutions realized by MCA as well as a discussion on a fab-synchrotron proof-of-concept.